Inventors:
Robert J. Zeches - San Francisco CA, US
Lane W. Martin - Champaign IL, US
Ramamoorthy Ramesh - Moraga CA, US
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA - Oakland CA
International Classification:
H01L 41/02
H01L 41/00
H01L 41/24
US Classification:
310313 R, 310367, 310311, 264449, 427100
Abstract:
The present invention provides for a composition comprising a thin film of BiFeOhaving a thickness ranging from 20 nm to 300 nm, a first electrode in contact with the BiFeOthin film, and a second electrode in contact with the BiFeOthin film; wherein the first and second electrodes are in electrical communication. The composition is free or essentially free of lead (Pb). The BFO thin film is has the piezoelectric property of changing its volume and/or shape when an electric field is applied to the BFO thin film.