Kwok Lai Phones & Addresses
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Northbrook, IL
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Port Saint Lucie, FL
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Wheeling, IL
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Niles, IL
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Hercules, CA
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Port St Lucie, FL
Work
Company:
Yeung Terry & Lai
Address:
Business Records
Name / Title
Company / Classification
Phones & Addresses
Owner, Managing
New Peking Chinese Restaurant LLC
Eating Place
Eating Place
2154 SE Dolphin Rd, Fort Pierce, FL 34952
1629 SE Grn Acres Cir, Fort Pierce, FL 34952
1818 NE Jensen Bch Blvd, Jensen Beach, FL 34957
1629 SE Grn Acres Cir, Fort Pierce, FL 34952
1818 NE Jensen Bch Blvd, Jensen Beach, FL 34957
Publications
Us Patents
US Patent:
62177168, Apr 17, 2001
Filed:
May 6, 1998
Appl. No.:
9/073358
Inventors:
Kwok Fai Lai - Berkeley CA
Assignee:
Novellus Systems, Inc. - San Jose CA
International Classification:
C23C 1434
US Classification:
20419212
Abstract:
Magnetic field lines within a hollow cathode magnetron sputtering device are modified by various means to improve the full-face erosion profile of the hollow cathode target. These means include, varying the magnetic field of the main magnetic source, extending the magnetic field beyond the opening in the hollow cathode and adding a stationary or mobile magnetic field source adjacent to the closed end surface of the hollow cathode target. The present invention employs various embodiments which when implemented individually or in combination improve the full face erosion of a target cathode in a hollow cathode magnetron sputtering source.