John C Corless

8125633, Feb 28, 2012

May 6, 2008

12/151449

Mike Whelan - Coppell TX, US
Andrew Weeks Kueny - Dallas TX, US
Kenneth C. Harvey - Dallas TX, US
John Douglas Corless - Dallas TX, US

Verity Instruments, Inc. - Carrollton TX

G01J 3/00

356300

The present invention is directed to a system and method for radiometric calibration of spectroscopy equipment utilized in fault detection and process monitoring. Initially, a reference spectrograph is calibrated to a local primary standard (a calibrated light source with known spectral intensities and traceable to a reference standard). Other spectrographs are then calibrated from the reference spectrograph rather than the local primary calibration standard. This is accomplished by viewing a light source with both the reference spectrograph and the spectrograph to be calibrated. The output from the spectrograph to be calibrated is compared to the output of the reference spectrograph and then adjusted to match that output. The present calibration process can be performed in two stages, the first with the spectrographs calibrated to the reference spectrograph and then are fine tuned to a narrow band light source at the plasma chamber. Alternatively, the reference spectrograph can be calibrated to the local primary standard while optically coupled to the plasma chamber.

20120025097, Feb 2, 2012

Jun 22, 2011

13/166571

Mark Anthony Meloni - The Colony TX, US
John Douglas Corless - Dallas TX, US
Andrew Weeks Kueny - Dallas TX, US
Mike Whelan - Coppell TX, US

G01N 21/64

2504581, 250216

A workpiece characterization system for obtaining simultaneous measurement of layer and photoluminescence properties of a workpiece. The workpiece characterization system includes an excitation light and an illumination light each impinging upon a surface of a workpiece whereby the workpiece emits photoluminescent light and encodes light from said illumination source with layer information. The excitation light and the illumination light are generated from a single light source. The light from the single light source is filtered to remove wavelengths of light that correlate to light wavelengths emitted from the workpiece as a result of excitation. Wavelengths that correlate to light reflected from the workpiece that may contain encoded information are not filtered.

20120120387, May 17, 2012

Oct 31, 2011

13/286050

Mark Anthony Meloni - The Colony TX, US
John Douglas Corless - Dallas TX, US
Andrew Weeks Kueny - Dallas TX, US
Mike Whelan - Coppell TX, US

G01N 21/64
G01B 11/06

356 72, 2504581

A workpiece characterization system for obtaining simultaneous measurement of layer and photoluminescence properties of a workpiece. The workpiece characterization system includes an excitation light and an illumination light each impinging upon a surface of a workpiece whereby the workpiece emits photoluminescent light and encodes light from said illumination source with layer information. The excitation light and the illumination light are generated from a single light source. The light from the single light source is filtered to remove wavelengths of light that correlate to light wavelengths emitted from the workpiece as a result of excitation. Wavelengths that correlate to light reflected from the workpiece that may contain encoded information are not filtered.

20130016343, Jan 17, 2013

Jul 11, 2011

13/180508

John Douglas Corless - Dallas TX, US
Andrew Weeks Kueny - Dallas TX, US
Mark Anthony Meloni - The Colony TX, US

G01J 1/00

356213

A referenced and stabilized optical measurement system includes a light source, a plurality of optical elements and optical fiber assemblies and a detector arranged to compensate for the effects of system variation which may affect measurement performance. A non-continuous light source provides a common source light on a common source path. A reference light and a measurement light are derived from the common source light and propagated across separate paths of optically matching optical components in order to produce a common signal variation on both the reference light signal and the measurement light signal. Light paths exposed to air are contained indiscrete volumes for purging gasses from the volumes. Ratios of the reference signal and measurement signal are acquired under various conditions for compensating the measurement signal for system variations.

20220406586, Dec 22, 2022

Aug 23, 2022

17/893685

- Carrollton TX, US
John D. Corless - Carrollton TX, US
Mark Anthony Meloni - Carrollton TX, US
Mike Whelan - Carrollton TX, US

H01J 49/02
H04N 5/378
H04N 5/357
G01B 11/06
H04N 5/372
H04N 5/355
H01L 27/148
H04N 5/347
G01N 21/31
G01N 21/71

The disclosure provides multimode configurable spectrometers, a method of operating a multimode configurable spectrometer, and an optical monitoring system. In one embodiment the multimode configurable spectrometer includes: (1) an optical sensor configured to receive an optical input and convert the optical input to electrical signals, wherein the optical sensor includes multiple active pixel regions for converting the optical input to the electrical signals, (2) conversion circuitry, having multiple selectable converting circuits, that is configured to receive and convert the electrical signals to a digital output according to a selected one of the selectable converting circuits, and (3) a sensor controller configured to set a synchronized operating mode to direct operation of the optical sensor and select, based on the synchronized operating mode, at least one of the selectable converting circuits to provide the digital output.

20200264044, Aug 20, 2020

Feb 11, 2020

16/788024

- Carrollton TX, US
John D. Corless - Carrollton TX, US

G01J 3/02
H01L 21/66

An optical system having an OAP mirror collimator is disclosed with a housing, an OAP mirror located within the housing and has an optical axis, a fold plane and a focal point. A fiber optical cable is coupled to the housing and has first and second optical fibers, each having an exit end that form a common end face of the fiber optic cable, wherein the fiber optical cable is rotationally and translationally aligned to the OAP mirror such that the common face is perpendicular to and centered upon the optical axis of the OAP mirror and positioned a fixed distance from the focal point, and wherein the optical axes of the first and second optical fibers are jointly angularly aligned to the fold plane, and the optical axes of the first and second optical fibers deviate from being parallel to the optical axis by no more than 0.15 degrees.

20180286650, Oct 4, 2018

Mar 21, 2018

15/927729

- Carrollton TX, US
John D. Corless - Carrollton TX, US
Mark Anthony Meloni - Carrollton TX, US
Mike Whelan - Carrollton TX, US

H01J 49/02
H04N 5/378
H04N 5/357
H04N 5/347
H04N 5/372
H04N 5/355
H01L 27/148
G01B 11/06

The disclosure provides multimode configurable spectrometers, a method of operating a multimode configurable spectrometer, and an optical monitoring system. In one embodiment the multimode configurable spectrometer includes: (1) an optical sensor configured to receive an optical input and convert the optical input to electrical signals, wherein the optical sensor includes multiple active pixel regions for converting the optical input to the electrical signals, and (2) conversion circuitry, having multiple selectable converting circuits, that is configured to receive and convert the electrical signals to a digital output according to a selected one of the selectable converting circuits.

20180136118, May 17, 2018

Nov 2, 2017

15/802286

- Carrollton TX, US
Mike Whelan - Carrollton TX, US
Mark Anthony Meloni - Carrollton TX, US
John D. Corless - Carrollton TX, US
Rick Daignault - Carrollton TX, US
Sean Lynes - Carrollton TX, US

G01N 21/27
H01J 37/32
G01J 3/443
G01J 3/28
H01L 21/68
G01N 21/66
H05H 1/00
H01L 21/66

The disclosure provides an optical calibration device for in-chamber calibration of optical signals associated with a processing chamber, a characterization system for plasma processing chambers, methods of characterizing plasma processing chambers, and a chamber characterizer. In one example, the optical calibration device includes: (1) an enclosure, (2) an optical source located within the enclosure and configured to provide a source light having a continuous spectrum, and (3) optical shaping elements located within the enclosure and configured to form the source light into a calibrating light that approximates a plasma emission during an operation within the processing chamber.