Inventors:
Hans Jostlein - Naperville IL, US
Assignee:
Universities Research Association, Inc. - Washington DC
International Classification:
F04D 19/04
US Classification:
415 1, 415 9, 415 62, 415 66, 415 68, 415 90, 415143, 415229, 417205, 417244, 4174234, 41742312
Abstract:
An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within the chamber. The turbofan employs large diameter rotor blades operating at high linear blade velocity to impart an ultra-high pumping speed to a fluid. The second stage turbomolecular pump is fluidly connected downstream from the first stage turbofan. In operation, the first stage turbofan operates in a pre-existing vacuum, with the fluid asserting only small axial forces upon the rotor blades. The turbofan imparts a velocity to fluid particles towards an outlet at a high volume rate, but moderate compression ratio. The second stage conventional turbomolecular pump then compresses the fluid to pressures for evacuation by a roughing pump.