Inventors:
Qingchun Zhang - Cary NC, US
Anant Agarwal - Chapel Hill NC, US
Doyle Craig Capell - Durham NC, US
Albert Burk - Chapel Hill NC, US
Joseph Sumakeris - Cary NC, US
Michael O'Loughlin - Chapel Hill NC, US
International Classification:
H01L 29/24
H01L 21/04
US Classification:
257 77, 438478, 257E29104, 257E21065
Abstract:
A silicon carbide-based power device includes a silicon carbide drift layer having a planar surface that forms an off-axis angle with a direction of less than 8.